Master of Engineering (M.Eng.) in Plasma Engineering

The MEng in Engineering, Plasma Engineering Concentration is a professionally oriented degree program for students whose primary intent is a career in industry or government. This degree differs from the Master of Science degree in that it is a terminal degree, not a pathway to a doctoral program. Concentrations under the MEng in Engineering major include Aerospace Systems Engineering, Autonomy and Robotics, Digital Agriculture, Energy Systems, Instrumentation and Applied Physics, and Plasma Engineering.

The M.Eng. in plasma engineering is an industry-oriented degree that prepares graduates to drive innovation and become leaders in etching, deposition, and lithography, all of which are essential to the production of semiconductor chips. Knowledge and experience in using and understanding plasmas is vital, but largely missing from the education of professionals in the field. Finding solutions to current and future processing challenges requires a mastery of the core concepts of plasma engineering and topical depth in a professional focus area. This professionally oriented master's degree helps students to develop this expertise and gain hands-on experience with a practicum or a project.

The Grainger College of Engineering at the University of Illinois Urbana-Champaign is a formidable force in engineering. Our sought-after faculty, top-flight rankings, and award-winning graduates haven't just turned heads - they've changed the world. The list of inventions and innovations, prize-winners and patents, solutions, and start-ups that have come from Grainger Engineering is too long to list. Our high-achieving and determined learners, coupled with our high standards and powerful opportunities, yield great rewards not only for our students but for all. 38 top ten ranked degrees and specialties, 28 in the top 5 #5 overall undergraduate engineering program #11 overall graduate engineering program 98% of students secure top-choice employment or continued education 5 year Ph.D. funding guarantee.

Our Impact

The Grainger College of Engineering is one of the top engineering programs in the world, enabling individuals to improve their quality of life through education, research, innovation, entrepreneurship, and societal engagement. Our graduates and faculty transform the world for the better.

Leading excellence in engineering education and research

The Grainger College of Engineering at the University of Illinois is a leader in engineering and computing education, research, and public engagement. Our diverse, tight-knit community of faculty, students, and alumni is driving the future of technological advancements and innovation, relentlessly pursuing knowledge and empowering the next generation of engineers. Collectively, we are pushing the boundaries of what is possible to solve the world's greatest challenges and leaving a lasting legacy of excellence.

• 10,000+ students from 50 states and 100+ countries
• 400+ expert faculty leading breakthrough research
• 38 top-ten-ranked degree programs and specialties
• $221M in total research expenditures
• 97,000+ alumni worldwide
• $75,450 average BS degree starting salary
• 60+ labs, research centers, and institutes
• 9+ multidisciplinary research centers